Technician 4

Job Description

ESSENTIAL DUTIES AND RESPONSIBILITIES:

• Perform daily job duties to help in processing the HAMR wafers in CMP area.
• In-depth knowledge of slurry types, to help PE/EE/Chem identify if problem is slurry related and to make necessary changes if needed under given OCAPs
• Perform basic operation of different CMP tools in both manual and automatic mode as well as basic troubleshooting to identify if failure is CMP tool/process/recipe related.
• Perform basic operation of metrology tools (NANO, WYKO, ZYGO) as well as basic troubleshooting to identify if point of failure is metrology tool/recipe related.
• Perform non-standard process and can create/edit process recipe as well as create/edit wafer level CRMS.
• Good understanding of SPC chart and how to react to different warnings according to SPEC/OCAP as well as analyzing the CMP process/tool performance using basic knowledge in statistics/data analysis.
• Disposition hold wafer according to SPEC or disposition criteria provided by PE.  Also capable of dispositioning hold wafer with own judgement based on risk assessment/process expertise / related previous experience.
• In-depth knowledge of IT-related application/software such as CRMs, APC, CMP calculator, MITECS, GS3, TSD report, EDCSPC, SPC chart, Fabtime, etc.  Need to understand what data gets/goes from/to where.
• Notify PE/MFG if there’s any suspected excursion.  Do preliminary investigation and identify/hold all potentially affected wafers to contain the problem and minimize the impact.
• Basic understanding of different modules wafer process architecture and wafer build-up.
• Lead and support team project.

Operation

• Primary and backup tool allocation for each layer in CMP, specific to HAMR
• Hold reasoning in detail.
• SPC chart non-conformances and reasoning.

CMP Equipment

• Understand consumables.
• Understanding MIRRA config, zones, presssure, etc.
• Understanding of carrier build on NTEGs
• Understanding Ebara configuration, top ring, dresser build and overall tool function
• Clear understanding of DNS, SSEC and Ebara cleaning tool configuration and recipe principals
• Slurry configuration on the tools
• Cleaning chemicals on the tools

Qualifications

• Preffered AA Degree.
• 5 or more years wafer manufacturing hands-on experience
• Must have strong computer skills, including knowledge of Windows and proficiency with Microsoft Excel.
• Must be a self-starter and quick learner.
• Must be able to solve problems and troubleshoot minor process and equipment related issues.