Hard Service Facility Manager

Introduction to the job

The CRE Facility Manager is responsible for ensuring safe, reliable, compliant, and cost-effective operation of mission-critical facilities and infrastructure supporting semiconductor and high-tech operations.

The role provides end-to-end facility management leadership covering critical utilities, cleanroom environments, building systems, asset lifecycle management, maintenance, service-provider performance, emergency response, business continuity, and continuous improvement.

The Facility Manager acts as the key interface between CRE, business stakeholders, EHS, engineering teams, security, procurement, projects, and IFM/service partners to ensure facility services support business continuity and operational requirements.

Role and responsibilities

A. Facility Operations & Service Delivery

• Manage day-to-day operation of facility infrastructure and critical utilities.
• Ensure stable delivery of utilities and facility services required for semiconductor operations.
• Establish operational standards, SOPs, work instructions, checklists, and escalation procedures.
• Monitor facility performance and proactively address operational risks.
• Ensure effective 24/7 operational coverage, CCR monitoring, duty-on-call, and escalation arrangements where applicable.
• Manage planned shutdowns and facility interventions to minimize business impact.

Typical systems may include:

• HVAC / AHU / MAU
• Chilled and cooling water systems
• Electrical distribution, UPS and emergency generators
• CDA / compressed air
• Process cooling water
• Vacuum and specialty utility systems
• Cleanroom environmental controls
• Water / wastewater treatment
• Fire protection and life-safety systems
• Building Management System (BMS)
• Facility Monitoring / Control Systems planning.

B. Asset Management & Reliability

• Develop and maintain facility asset management strategies and lifecycle plans.
• Establish asset criticality and risk-based maintenance strategies.
• Drive preventive, predictive, condition-based, and corrective maintenance programs.
• Monitor equipment health, reliability, obsolescence, and lifecycle risks.
• Support development of long-term asset plans, replacement programs, and CAPEX requirements.
• Improve asset data quality, maintenance history, and CMMS performance.
• Drive reliability improvement based on failures, trends, RCA findings, and operational data.

C. Cleanroom & Semiconductor Facility Management

• Ensure facility systems meet semiconductor production and contamination-control requirements.
• Maintain required environmental conditions including: Temperature Relative humidity Pressure differential Particle control Air cleanliness Molecular contamination requirements where applicable
• Coordinate facility changes that could affect tool operation, cleanroom performance, or production continuity.
• Support tool installation, hook-up, modification, qualification, and facility readiness activities.
• Manage facility risks associated with vibration, contamination, utilities, and environmental conditions.. Business Continuity & D.

D. Business Continuity & Emergency Response

• Establish facility emergency response and escalation procedures.
• Participate in the site Business Continuity Management (BCM) framework.
• Ensure contingency strategies are established for critical utilities and facility assets.
• Coordinate response to facility incidents, alarms, utility interruptions, and abnormal situations.
• Lead or coordinate incident investigation and Root Cause Analysis (RCA).
• Ensure corrective and preventive actions are implemented and tracked to closure.
• Conduct emergency exercises and validate facility recovery arrangements.
• Maintain clear management communication during major incidents.

E. EHS, Compliance & Risk Management

• Ensure facility operations comply with applicable legal, regulatory, corporate, and EHS requirements.
• Support identification and mitigation of facility operational risks.
• Ensure safe execution of maintenance and contractor activities.
• Implement appropriate permit-to-work, LOTO, MOC, and contractor-control processes.
• Support audits, inspections, compliance assessments, and corrective-action management.
• Promote a strong Safety First culture across employees and service providers.

F. IFM & Supplier Management

• Manage Integrated Facility Management (IFM) partners and specialist service providers.
• Define clear responsibilities, deliverables, SLA/KPI requirements, and escalation mechanisms.
• Conduct regular supplier performance and management reviews.
• Monitor quality, safety, reliability, responsiveness, cost, and customer satisfaction.
• Drive continuous improvement and corrective actions with service partners.
• Ensure outsourced activities remain effectively governed by CRE.

Key principle: Service delivery may be outsourced, but accountability for facility performance, risk, compliance, and business continuity remains actively governed by the Facility Manager.

H. Continuous Improvement & Operational Excellence

• Drive continuous improvement in facility safety, reliability, availability, sustainability, and cost.
• Use operational data and trends to identify improvement opportunities.
• Promote standardized working methods and best practices across sites.
• Support digitalization, condition monitoring, predictive maintenance, and smart-facility initiatives.
• Benchmark facility performance and drive maturity improvement.

Education & Experience

• Bachelor's degree in Mechanical Engineering, Electrical Engineering, Building Services, Facility Engineering, Industrial Engineering, or related technical discipline.
• Typically 8+ years of relevant facility, engineering, or infrastructure experience, with significant experience in semiconductor, electronics, cleanroom, or other mission-critical environments.
• Demonstrated experience managing critical utilities and technical facility systems.
• Experience managing outsourced facility/service providers.
• Strong understanding of preventive maintenance, asset reliability, risk management, and emergency response.
• Ability to manage operations in a complex, high-uptime environment.

Leadership

• Operational ownership
• Decision-making under pressure
• Stakeholder management
• Supplier governance
• Cross-functional collaboration
• Problem solving
• Risk-based thinking
• Financial awareness
• Continuous improvement mindset
• Effective communication and escalation

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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