Tesla

Makes electric cars, robotaxis and grid batteries

Process Engineer - Implant

Process EngineeringUpdated on Nov 10

Full-timeAustin, TX, USANo salary listedIn-person

About the Job

Requirements

A degree in Chemical Engineering, Materials Science, Electrical Engineering, or Physics, or equivalent experience.
Hands-on ion implantation process and integration engineering experience in a semiconductor fab, focused on advanced logic or memory technologies.
Expertise in ion implanters.
A proven track record establishing Process of Record for critical implant steps at advanced nodes.
Proficiency with implant metrology.
Strong design of experiments skills and statistical analysis capability.
Ability to collaborate proactively across diffusion/anneal, thin films, integration, and equipment engineering teams.

Responsibilities

Develop and qualify high-current, medium-current, and low-energy ion implantation processes, including source/drain, substrate, channel, well, and halo implants for logic and memory devices.
Optimize dopant species, energy, dose, tilt, rotation, beam current, and damage engineering to achieve precise junction profiles, sheet resistance, and leakage performance.
Own ion implant processes end-to-end, from tool installation and qualification through recipe development, beam setup optimization, particle and metal contamination control, and high-volume manufacturing handoff.
Qualify implant tools from installation to production readiness, including beam calibration, uniformity, angle control, wafer charging management, and chamber matching.
Analyze implant process, dopant distribution, and device performance using first-principles, physics-based approaches to understand implantation mechanisms, amorphization, channeling, and transient enhanced diffusion interactions.
Lead root-cause analysis for profile shifts, device parameter variation, and yield issues; establish inline metrology and control strategies; and drive systematic yield improvement.
Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues.
Drive development of next-generation implantation techniques, including plasma doping and advanced damage/activation strategies for sub-2nm nodes and specialized applications.

Category	Terafab
Location	Austin, Texas
Requisition ID	271014
Type	Full-time

Job Description

Terafab is building a vertically integrated semiconductor factory at an unprecedented scale. The facility brings logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot. Process engineering is the discipline that turns Terafab technology into reality, atom by atom. This role owns ion implantation processes across three distinct chip families: edge-inference processors, space-hardened data center SI chips for orbital satellites, and high-bandwidth memory. The engineer will develop and optimize dopant implantation, profile control, and stress engineering while balancing junction performance, thermal budget compatibility, defectivity, and integration constraints across radically different product requirements. This is a highly hands-on role requiring deep expertise in ion implantation while collaborating closely with diffusion/anneal, thin films, etch, CMP, metallization, photo, metrology, and integration teams in one of the most ambitious fab programs in the world. This position is open across multiple levels. Level and title are based on experience, skills, and overall qualifications during the interview process.

Job Responsibilities

Develop and qualify high-current, medium-current, and low-energy ion implantation processes, including source/drain, substrate, channel, well, and halo implants for logic and memory devices
Optimize critical implant parameters: dopant species, energy, dose, tilt, rotation, beam current, and damage engineering to achieve precise junction profiles, sheet resistance, and leakage performance
Own ion implant processes end-to-end: from tool installation and qualification through recipe development, beam setup optimization, particle and metal contamination control, and HVM handoff
Qualify implant tools from installation to production readiness, including beam calibration, uniformity, angle control, wafer charging management, and chamber matching
Analyze implant process, dopant distribution, and device performance using first-principles, physics-based approaches to understand implantation mechanisms, amorphization, channeling, and transient enhanced diffusion (TED) interactions
Lead root cause analysis for profile shifts, device param variation, and yield issues; establish inline metrology and control strategies; and drive systematic yield improvement
Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
Drive development of next-generation implantation techniques, including plasma doping (PLAD) and advanced damage/activation strategies for sub-2nm nodes and specialized applications

Job Requirements

Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or equivalent experience
Hands-on ion implantation process and integration engineering experience in a semiconductor fab, with strong focus on advanced logic or memory technologies
Expertise in ion implanters
Proven track record establishing Process of Record (POR) for critical implant steps at advanced nodes
Proficiency with implant metrology
Strong DOE skills and statistical analysis capability
Excellent collaboration skills with the ability to work proactively across diffusion/anneal, thin films, integration, and equipment engineering teams

About the Company

Tesla

Makes electric cars, robotaxis and grid batteries

Tesla makes electric cars and batteries that store power for homes and utilities, and it develops self-driving software and humanoid robots. In 2023, its Model Y became the first electric vehicle to rank as the world's best-selling car. Buyers order the Model 3 sedan, Model Y SUV, or Cybertruck pickup directly from Tesla instead of through dealers, and they charge on its Supercharger fast-charging network. It also sells Megapack and Powerwall batteries, runs a robotaxi service, and charges drivers a monthly fee for self-driving software that still needs their supervision. Tesla was founded in 2003, with Elon Musk as its lead early investor and a recognized co-founder, and it is based in Austin, Texas.

Company size: 10,001+
Company stage: IPO
Headquarters: Austin, TX
Founded: 2003

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