Tesla

Makes electric cars, robotaxis and grid batteries

Senior Process Engineer - Lithography

Process EngineeringConfirmed live in the last 24 hours

Full-timeAustin, TX, USANo salary listedIn-person

About the Job

Requirements

A degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or a related technical field, or equivalent experience.
At least five years of hands-on lithography process engineering experience in a semiconductor fabrication plant, especially in an advanced logic, memory, or foundry environment.
Deep experience with scanner qualification, resist process development, and establishing process of record (POR) at advanced nodes.
Proficiency with lithography metrology tools, overlay metrology, defect inspection, and resist profile characterization.
Design of Experiments skills and statistical analysis capability.
Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams.

Responsibilities

Develop and qualify EUV and ArFi resist processes, exposure parameters, and coat/develop optimization for critical layers.
Qualify EUV and DUV scanners from installation through production readiness, including dose-focus matrices, critical dimension uniformity (CDU), and overlay.
Own in-house mask shop process development, including resist, etch, inspection, and repair, and co-optimize reticle-scanner strategies using tight feedback loops.
Establish overlay and registration control strategies, scanner-to-scanner matching, and advanced process control (APC) loop integration.
Analyze processes using a first-principles, physics-based approach to understand and manipulate mechanisms rather than relying only on recipes.
Lead root cause analysis, establish inline metrology and statistical process control (SPC) strategies, and drive systematic yield improvement.
Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues.
Drive next-generation lithography materials and process development.

Category	Terafab
Location	Austin, Texas
Requisition ID	267824
Type	Full-time

Job Description

We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.  Process engineering is where Terafab technology gets built, atom by atom, and lithography will define the limit of what we can build. You will develop and own patterning processes across three distinct chip families: edge-inference processors, space-hardened chips for orbital satellites, and high-bandwidth memory.  With mask production in-house, you'll have unprecedented feedback loops to co-optimize reticle and scanner strategies. You should have deep expertise in optical lithography, but be ready to work across core process domains such as etch, metrology, and film deposition as integration evolves. This is a highly hands-on role at one of the most ambitious fab programs in the world.

Job Responsibilities

Develop and qualify EUV and ArFi resist processes, exposure parameters, and coat/develop optimization for critical layers

Qualify scanners (EUV and DUV) from installation through production readiness, including dose-focus matrices, CDU, and overlay

Own in-house mask shop process development (resist, etch, inspection, repair) and co-optimize reticle-scanner strategies using tight feedback loops

Establish overlay and registration control strategies, scanner-to-scanner matching, and APC loop integration

Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes

Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement

Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues

Drive next-generation lithography materials and process development

Job Requirements

Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience

5+ years of hands-on lithography process engineering experience in a semiconductor fab, especially advanced logic, memory, or foundry environment

Deep experience with scanner qualification, resist process development, and process of record (POR) establishment at advanced nodes

Proficiency with lithography metrology tools, overlay metrology, defect inspection, and resist profile characterization

Strong Design of Experiments skills and statistical analysis capability

Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams

About the Company

Tesla

Makes electric cars, robotaxis and grid batteries

Tesla makes electric cars and batteries that store power for homes and utilities, and it develops self-driving software and humanoid robots. In 2023, its Model Y became the first electric vehicle to rank as the world's best-selling car. Buyers order the Model 3 sedan, Model Y SUV, or Cybertruck pickup directly from Tesla instead of through dealers, and they charge on its Supercharger fast-charging network. It also sells Megapack and Powerwall batteries, runs a robotaxi service, and charges drivers a monthly fee for self-driving software that still needs their supervision. Tesla was founded in 2003, with Elon Musk as its lead early investor and a recognized co-founder, and it is based in Austin, Texas.

Company size: 10,001+
Company stage: IPO
Headquarters: Austin, TX
Founded: 2003

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